Dislocation reduction through nucleation and growth selectivity of metal-organic chemical vapor deposition GaN

of metal-organic chemical vapor deposition GaN Wei Zhang, Peichi Liu, Biyun Jackson, Tianshu Sun, Shyh-Jer Huang, Hsiao-Chiu Hsu, Yan-Kuin Su, Shoou-Jinn Chang, Lei Li, Ding Li, Lei Wang, XiaoDong Hu, and Y. H. Xie Department of Materials Science and Engineering, University of California Los Angeles, California 90095, USA Department of Physics, University of Maryland college park, Maryland 20742, USA Advanced Optoelectronic Technology Center and Institute of Microelectronics and Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan Department of Electrical Engineering, Kun Shan University of Technology, Yung-Kang, Tainan 710, Taiwan State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China